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... a Microelectronic-mechanical System(MEMS) gyroscope.The structure of SHH17 # MEMS gyroscope developed by ourselves was ...
基于MEMS技术的微电容超声传感器(CMUT ... -machined Ultrasonic Transducers (CMUT)based on MEMS has de-veloped,which has been the main ...
基于MEMS技术研制的微电容超声传感器,在 ... 。The Capacitive Micromachined Ultrasonic Transducers based on MEMS technology has developed.Under the action of ...
... wave near-infrared(NIR)spectrometer based on MEMS micromirror,theoretical principles and methods of designing InGaAs ...
... 对微机电系统(Micro Electro Mechanical System,MEMS)的研究十分活跃,各种微机器人的 ... 分支,提出的这种驱动方式,将给MEMS的研究提供一种新的解决 ...
... 实验室才可能配置。 随着MEMS(Micro-Electro-Mechanical)技术的进步,加速度,陀螺 ... 输入到节点的MCU上。而MEMS陀螺仪则使用一个双轴陀螺 ...
... 作为主数字信号处理器,采集各MEMS惯性传感器的信号并处理,处理 ... 口设计,系统电源供给电路和MEMS传感器,WIFI模块等。而驱动 ...